A bidirectional scanning method for scanning transmission X-ray microscopy

Scanning mode is a key factor for the comprehensive performance, including imaging efficiency, of scanning transmission X-ray microscopy (STXM). Herein presented bidirectional method designed STXM with an S-shaped moving track. In this method, artificially ramp waves are generated by piezo-stage controller to control two-dimensional sample. The sample position information measured using laser interferometric sensors and sent field-programmable gate array (FPGA) board which also acquires signals simultaneously from detector. Since data recorded FPGA contain real each scanned point, influence backlash caused back-turning movement on image can be eliminated. By employing adapted post-processing program, re-meshed high-resolution obtained. This S-track in fly-scan has been implemented endstation at Shanghai Synchrotron Radiation Facility (SSRF), successfully resolved ∼30 nm interval between innermost strips Siemens star. work removes limitation motor vibration, significantly improves efficiency experiments.